Wafer & Glass Coating System

The XENIA is an inline wafer and glass coating system based on our proprietary large-area sputtering technology. As the coater is very wide and can therefore process many substrates at the same time, it is especially suited for high productivity applications at very low costs. It is also suited for other small and even very thin substrates. One of the fields of application for the XENIA is the manufacturing of high-efficiency solar products.

Thanks to its modular design, the XENIA can be equipped with rotatable magnetrons for the sputter deposition of high-performance TCO layers or several other materials, such as metals and metal oxides. The substrates can also be pre-treated by cleaning or etching, either under vacuum or before it enters the vacuum.

The XENIA benefits from our experience gained from delivering more than 140 coating systems to the photovoltaics industry. It is the perfect choice for customers looking for highly productive and flexible production equipment combined with proven technology and design.


Applications: photovoltaics

Substrate shape: flat/rigid

Substrate material: glass, metals, polymer, wafers

Coating Technology: magnetron sputtering down

Function: anti-reflection, contact, passivation, TCO

Layers & Layer stacks: Ag, Al, AlOx, AZO, Cu, ITiO, ITO, Ni, NiV, Si, SiN, SiOx, Ti, TiOx, Zn

Corresponding Components & Systems:
Sputter Components

Corresponding equipment