XEA|nova®
Overview
Applications: fuel cells, photovoltaics
Substrate shape: flat/rigid
Substrate material: glass, metals, polymer, stainless steel, wafers
Coating Technology: electron beam technology, magnetron sputtering down, magnetron sputtering up
Function: anti-reflection, contact, corrosion protection, passivation, TCO
Layers & Layer stacks: Ag, Al, AlOx, AZO, C, Co, Cr, Cu, ITiO, ITO, Ni, NiV, SiN, SiOx, Ti, TiOx, Zn
Corresponding Components & Systems:
Sputter Components
Pre-Treatment