XEA|nova®

Overview

Applications: fuel cells, photovoltaics

Substrate shape: flat/rigid

Substrate material: glass, metals, polymer, stainless steel, wafers

Coating Technology: electron beam technology, magnetron sputtering down, magnetron sputtering up

Function: anti-reflection, contact, corrosion protection, passivation, TCO

Layers & Layer stacks: Ag, Al, AlOx, AZO, C, Co, Cr, Cu, ITiO, ITO, Ni, NiV, SiN, SiOx, Ti, TiOx, Zn

Corresponding Components & Systems:
Sputter Components
Pre-Treatment


Corresponding equipment

Production/Internet/Live