vertical glass COATING system

The vertical inline sputter system VISS is an appropriate, modular solution for vertical deposition processes when scaling up from laboratory use to production. The tool is available either as a single end inline or for continuous processing and is uniquely suited for scaling up to substrate sizes of up to 600 mm x 2400 mm.

The substrates are transported by a carrier system, which is tilted vertically by seven degrees. The substrates can be loaded without touching their front side.




Applications: photovoltaics, precision optics

Substrate shape: flat/rigid

Substrate material: glass, metals, polymer, wafers

Coating Technology: magnetron sputtering down, magnetron sputtering up

Function: anti-reflection, contact, passivation, TCO

Layers & Layer stacks: Ag, Al, AlOx, AZO, Cu, ITiO, ITO, NiV, SiN, SiOx, Ti, TiOx, Zn