INLINE Systems

Modular Process Systems

For the processing of larger substrates at a higher productivity, VON ARDENNE provides several inline coating systems. We have delivered and installed such inline systems both in vertical and horizontal design.

They are used for medium-scale production and for layer optimization by customers running our larger coating equipment, as the resulting process parameters can be easily transferred.


Applications: architectural glazing, automotive, basic research, batteries, decorative coatings, displays & touch panels, fuel cells, LED lighting, mechatronics (MEMS, MOEMS), medical devices, organic LEDs, photovoltaics, precision optics, sensors

Substrate shape: flat/rigid, flexible, three-dimensional

Substrate material: glass, steel, wafers

Coating Technology: ALD, electron beam technology, hot-wire CVD (HWCVD), magnetron sputtering down, magnetron sputtering up, magnetron sputtering vertical, plasma-enhanced CVD (PECVD), thermal evaporation

Function: absorption, active OLED layer, anti-fingerprint, anti-reflection, contact, corrosion protection, decoration, diffusion barrier, heat insulation, passivation, primer, reflection, semiconductor, solar control, TCO, wave length filter

Layers & Layer stacks: Double Low-E, Low-E, Solar Control, Triple Low-E

Corresponding Components & Systems:
Electron Beam Components
Sputter Components
Measurement & Software

Corresponding equipment


Modular Process Systems