We have developed a high-utilization planar magnetron (HU-WSM) based on the experience that especially the planar magnetrons with silver targets are often the bottleneck limiting the campaign times.
The new magnetron is characterized by a service life of 6000 kWh* at a target utilization of up to 38 % under ideal conditions. The increased service life can be achieved while keeping the target utilization at an equal level.
*Applies to magnetrons with silver targets
